+420 54114 9207 | 
info@czechnanolab.cz
+420 54114 9207 | info@czechnanolab.cz
The CEITEC Nano Research Infrastructure provides complex equipment, expertise and methods for nanotechnology and advanced materials R&D. The CEITEC Nano facilities for nanofabrication, nanocharacterization, structural analysis and X-ray tomography enable to carry out complete fabrication of nanostructures and nanodevices and their characterization down to the sub-nanometre level in an entirely clean environment.
more information access
CEITEC Nano Main Building
 |  |
| Optical lithography lab. - Mask Aligner Suess MA8 | Optical lithography lab. - Automatic Coater/Developer Suess RCD8 |
 |  |
| Electron beam lithography - Tescan Mira3 and Raith 150 two | Laser Writer Heidelberg Instruments DWL66 |
 |  |
| PVD Lab. - Bestec Magnetron Sputtering System | PVD Lab. - Bestec E-beam Evaporator |
 |  |
| Dry Etching & CVD Lab. - Scia Mill Ion Beam Etching System | Dry Etching & CVD Lab. - SVCS LPCVD Furnaces |
 |  |
| Optical Lab. - J. A. Woolam Spectroscopic Ellipsometer | Optical Lab. - Bruker Vertex FTIR spectometer/microscope |
 |  |
| UHV Lab. - ScientaOmicron Scanning Auger Microscope | FIB Lab. - FIB/SEM system Tescan Lyra3 |
 |  |
| Coffee Room | Coffee Room and Self Service Food Shop (Lesní bar) |
