NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
The VASE is most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range from 193 to 2000nm. Variable wavelength and angle of incidence allow flexible measurement capabilities.
|* Reflection and Transmission Ellipsometry| |
|* Generalized Ellipsometry | |
|* Reflectance ® intensity | |
|* Transmittance (T) intensity | |
|* Cross-polarized R/T | |
|* Depolarization | |
|* Scatterometry | |
|* Mueller-matrix | |
Features
Spectral range | 193 – 2000 nm |
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Retarder | yes |
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Rotating analyser |
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Sample holder | vertical |
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Angle of incidence | 35° – 90° |
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Monochromator | HS 190 (Woollam) |
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Advanced
Focusing probes | Decreases the light beam to 200 microns in diameter |
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