Spectroscopic reflectometer Ocean Optics NanoCalc 2000

Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.

Spectral Range	250 – 1100 nm
Total thickness range	10 nm – 100 um
Resolution	0.1 nm
Repetability	0.3 nm
Absolute accuracy	< 1 % (100 nm – 10 um)
Number of layers	up to 10 layers
Distance with fiber	1 – 5 mm
Distance with optic	5 – 100 mm
Angle with optic	90° (nominal incidence)
Spot size	400 um (optional 100/200 um
Microspot	1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter
Fiber length	2 m (other lengths available on request)

Guarantor